Flat Panel Display-Solution for Gas Filtration

The flat-panel display market is fiercely competitive and technologically diverse. In response, manufacturers are committed to developing higher-resolution displays, new manufacturing technologies and more cost-effective manufacturing processes. Pollution control requirements for ambient air, process gas and liquid processes are higher than ever. High level processes require the control of smaller and smaller contaminants at ever smaller concentrations. During critical process steps, the possibility of dust particles to accumulate on large areas of panels is very high, so large air supply and circulating air volumes are required to improve air cleanliness and thus control product quality.